The new trend of miniaturization has led to the development of the micromechatronic system which are robust and compact in nature. These devices tend to bring down the scale of electro-mechanical device to the scale of microns. MEMS are also referred to as micromachines, made up of components between 1 to 100 micrometres in size. They usually consist of a central unit that processes data (the microprocessor) and several components that interact with the surroundings such as microsensors.
The major classification of these devices are sensors and actuators. MEMS manufacturing technologies :- Bulk Micromachining, Surface Micromachining, High aspect ratio (HAR) Sillicon Micromachining
The national MEMS design centre of SRM Univrersity , Chennai is working currently on the development of micro pumps and microvalves which would prove useful in the near future for microfluidic manipulation and many automation applications.
Information provide by Alkausil Tamboli
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